Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7938130 | Substrate holding rotating mechanism, and substrate processing apparatus | Hiroyuki Kaneko, Takahiro Ogawa | 2011-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7938130 | Substrate holding rotating mechanism, and substrate processing apparatus | Hiroyuki Kaneko, Takahiro Ogawa | 2011-05-10 |