Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976362 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Kenichi Kobayashi +2 more | 2011-07-12 |
| 7959977 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2011-06-14 |
| 7886685 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Takahiro Ogawa, Kenichi Suzuki +3 more | 2011-02-15 |