Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976362 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Teruyuki Watanabe +2 more | 2011-07-12 |
| 7959977 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2011-06-14 |