Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960519 | Interconnect structure improvements | Timothy J. Dalton, Jeffrey P. Gambino, Lee M. Nicholson, Andrew H. Simon, Anthony K. Stamper | 2005-11-01 |
| 6939797 | Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof | Edward Barth, Stephen M. Gates, Thomas Ivers, Sarah L. Lane, Jia Lee +3 more | 2005-09-06 |
| 6917108 | Reliable low-k interconnect structure with hybrid dielectric | Stephen E. Greco, Jia Lee, Stephen M. Gates, Terry A. Spooner, Matthew S. Angyal +3 more | 2005-07-12 |
| 6914320 | Bilayer HDP CVD/PE CVD cap in advanced BEOL interconnect structures and method thereof | Tze-Chiang Chen, Brett H. Engel, Terence L. Kane, Naftall E. Lustig, Ann McDonald +5 more | 2005-07-05 |
| 6911378 | Stabilization of fluorine-containing dielectric materials in a metal insulator wiring structure | Richard A. Conti, Kenneth M. Davis, David L. Rath, Daewon Yang | 2005-06-28 |
| 6887783 | Bilayer HDP CVD/PE CVD cap in advance BEOL interconnect structures and method thereof | Tze-Chiang Chen, Brett H. Engel, Terence L. Kane, Naftall E. Lustig, Ann McDonald +5 more | 2005-05-03 |
| 6864180 | Method for reworking low-k polymers used in semiconductor structures | Darryl D. Restaino, Delores Bennett, John Fritche, Jeffrey Hedrick, Chih-Chien Liu +2 more | 2005-03-08 |
| 6849563 | Method and apparatus for controlling coating thickness | Edward Barth, Arthur Winston Martin, Lee M. Nicholson | 2005-02-01 |
| 6838355 | Damascene interconnect structures including etchback for low-k dielectric materials | Anthony K. Stamper, Edward C. Cooney, III, Jeffrey P. Gambino, Timothy J. Dalton, Lee M. Nicholson | 2005-01-04 |