Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958540 | Dual damascene interconnect structures having different materials for line and via conductors | Jeffrey P. Gambino, Anthony K. Stamper, William T. Motsiff, Michael Lane, Andrew H. Simon | 2005-10-25 |
| 6888251 | Metal spacer in single and dual damascene processing | Robert M. Geffken, Anthony K. Stamper | 2005-05-03 |
| 6846741 | Sacrificial metal spacer damascene process | Robert M. Geffken, Anthony K. Stamper | 2005-01-25 |
| 6838355 | Damascene interconnect structures including etchback for low-k dielectric materials | Anthony K. Stamper, Jeffrey P. Gambino, Timothy J. Dalton, John A. Fitzsimmons, Lee M. Nicholson | 2005-01-04 |