Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6940173 | Interconnect structures incorporating low-k dielectric barrier films | Stephan A. Cohen, Stephen M. Gates, Elbert E. Huang, Dirk Pfeiffer | 2005-09-06 |
| 6933586 | Porous low-k dielectric interconnects with improved adhesion produced by partial burnout of surface porogens | Ann R. Fornof, Kang-Wook Lee, Christy S. Tyberg | 2005-08-23 |
| 6929982 | Patterning layers comprised of spin-on ceramic films | Stephen M. Gates, Elbert E. Huang, Dirk Pfeiffer | 2005-08-16 |
| 6911400 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Matthew E. Colburn, Stephen M. Gates, Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2005-06-28 |
| 6864180 | Method for reworking low-k polymers used in semiconductor structures | Darryl D. Restaino, Delores Bennett, John A. Fitzsimmons, John Fritche, Chih-Chien Liu +2 more | 2005-03-08 |
| 6844257 | Porous low-k dielectric interconnects with improved adhesion produced by partial burnout of surface porogens | Ann R. Fornof, Kang-Wook Lee, Christy S. Tyberg | 2005-01-18 |