Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939797 | Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof | John A. Fitzsimmons, Stephen M. Gates, Thomas Ivers, Sarah L. Lane, Jia Lee +3 more | 2005-09-06 |
| 6849563 | Method and apparatus for controlling coating thickness | John A. Fitzsimmons, Arthur Winston Martin, Lee M. Nicholson | 2005-02-01 |