Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806207 | Method of depositing low K films | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2004-10-19 |
| 6803325 | Apparatus for improving barrier layer adhesion to HDP-FSG thin films | Hichem M'Saad, Dana Tribula, Manoj Vellaikal, Sameer Desai | 2004-10-12 |
| 6743737 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Robert P. Mandal | 2004-06-01 |
| 6734115 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2004-05-11 |
| 6706138 | Adjustable dual frequency voltage dividing plasma reactor | Michael Barnes, John Holland, Alexander Paterson, Valentin Todorov | 2004-03-16 |