Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831021 | Plasma method and apparatus for processing a substrate | Tal Cheng Chua, Philip Allan Kraus | 2004-12-14 |
| 6818562 | Method and apparatus for tuning an RF matching network in a plasma enhanced semiconductor wafer processing system | Valentin N. Todorow, Nicolas Gani | 2004-11-16 |
| 6790375 | Dechucking method and apparatus for workpieces in vacuum processors | Arthur M. Howald | 2004-09-14 |
| 6727655 | Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber | Jon McChesney, Alex Paterson, Valentin N. Todorow, Michael Barnes | 2004-04-27 |
| 6706138 | Adjustable dual frequency voltage dividing plasma reactor | Michael Barnes, Alexander Paterson, Valentin Todorov, Farhad Moghadam | 2004-03-16 |
| 6694915 | Plasma reactor having a symmetrical parallel conductor coil antenna | Valentin N. Todorow, Michael Barnes | 2004-02-24 |
| 6685798 | Plasma reactor having a symmetrical parallel conductor coil antenna | Valentin N. Todorow, Michael Barnes | 2004-02-03 |