Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818562 | Method and apparatus for tuning an RF matching network in a plasma enhanced semiconductor wafer processing system | John Holland, Nicolas Gani | 2004-11-16 |
| 6727655 | Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber | Jon McChesney, Alex Paterson, John Holland, Michael Barnes | 2004-04-27 |
| 6694915 | Plasma reactor having a symmetrical parallel conductor coil antenna | John Holland, Michael Barnes | 2004-02-24 |
| 6685798 | Plasma reactor having a symmetrical parallel conductor coil antenna | John Holland, Michael Barnes | 2004-02-03 |