Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803325 | Apparatus for improving barrier layer adhesion to HDP-FSG thin films | Hichem M'Saad, Manoj Vellaikal, Farhad Moghadam, Sameer Desai | 2004-10-12 |
| 6713390 | Barrier layer deposition using HDP-CVD | Hichem M'Saad, Seon-Mee Cho | 2004-03-30 |