Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803265 | Liner for semiconductor memories and manufacturing method therefor | Minh Van Ngo, Arvind Halliyal, Tazrien Kamal, Hidehiko Shiraiwa, Rinji Sugino +1 more | 2004-10-12 |
| 6803313 | Method for forming a hardmask employing multiple independently formed layers of a pecvd material to reduce pinholes | Lu You, Richard J. Huang | 2004-10-12 |
| 6764949 | Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication | Douglas J. Bonser, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Darin A. Chan +6 more | 2004-07-20 |