Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, William N. Partlo +10 more | 2003-09-23 |
| 6603549 | Convolution method for measuring laser bandwidth | Steven F. Haas, Richard L. Sandstrom, Thomas Hofmann | 2003-08-05 |
| 6590922 | Injection seeded F2 laser with line selection and discrimination | Eckehard D. Onkels, Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Choonghoon Oh | 2003-07-08 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Herve A. Besaucele, William N. Partlo, Richard L. Sandstrom, Palash P. Das +7 more | 2003-05-20 |
| 6556600 | Injection seeded F2 laser with centerline wavelength control | Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Eckehard D. Onkels, Choonghoon Oh | 2003-04-29 |
| 6556612 | Line narrowed laser with spatial filter | Igor V. Fomenkov | 2003-04-29 |
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Jean-Marc Hueber, Thomas Hofmann, Vladimir B. Fleurov | 2003-04-22 |
| 6549551 | Injection seeded laser with precise timing control | Richard M. Ness, Richard L. Sandstrom, William N. Partlo | 2003-04-15 |
| 6538737 | High resolution etalon-grating spectrometer | Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, Daniel J. W. Brown | 2003-03-25 |
| 6535531 | Gas discharge laser with pulse multiplier | Scott T. Smith, Rajasekhar Rao | 2003-03-18 |
| 6529321 | Protective overcoat for replicated diffraction gratings | Xiaojiang Pan, Richard G. Morton | 2003-03-04 |
| 6511703 | Protective overcoat for replicated diffraction gratings | Xiaojiang Pan, Richard G. Morton | 2003-01-28 |