Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2003-09-23 |
| 6590922 | Injection seeded F2 laser with line selection and discrimination | Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Alexander I. Ershov, Choonghoon Oh | 2003-07-08 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Herve A. Besaucele, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +7 more | 2003-05-20 |
| 6560263 | Discharge laser having electrodes with sputter cavities and discharge peaks | Richard G. Morton, Zsolt Bor | 2003-05-06 |
| 6556600 | Injection seeded F2 laser with centerline wavelength control | Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Alexander I. Ershov, Choonghoon Oh | 2003-04-29 |
| 6539042 | Ultra pure component purge system for gas discharge laser | Shahryar Rokni, Xiaojiang Pan | 2003-03-25 |