Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654403 | Flow shaping electrode with erosion pad for gas discharge laser | Richard C. Ujazdowski, Michael C. Cates | 2003-11-25 |
| 6644324 | Laser discharge chamber passivation by plasma | Tom A. Watson, Richard L. Sandstrom, Robert E. Weeks, John Quitter, Mark R. Lewis | 2003-11-11 |
| 6584132 | Spinodal copper alloy electrodes | — | 2003-06-24 |
| 6560263 | Discharge laser having electrodes with sputter cavities and discharge peaks | Zsolt Bor, Eckehard D. Onkels | 2003-05-06 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey +7 more | 2003-04-01 |
| 6529321 | Protective overcoat for replicated diffraction gratings | Xiaojiang Pan, Alexander I. Ershov | 2003-03-04 |
| 6511703 | Protective overcoat for replicated diffraction gratings | Xiaojiang Pan, Alexander I. Ershov | 2003-01-28 |