Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Herve A. Besaucele, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +7 more | 2003-05-20 |
| 6539042 | Ultra pure component purge system for gas discharge laser | Shahryar Rokni, Eckehard D. Onkels | 2003-03-25 |
| 6529321 | Protective overcoat for replicated diffraction gratings | Richard G. Morton, Alexander I. Ershov | 2003-03-04 |
| 6511703 | Protective overcoat for replicated diffraction gratings | Richard G. Morton, Alexander I. Ershov | 2003-01-28 |