Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, David W. Myers, Alexander I. Ershov, William N. Partlo +10 more | 2003-09-23 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Palash P. Das +7 more | 2003-05-20 |
| 6553049 | ArF laser with low pulse energy and high rep rate | Jean-Marc Hueber, Alexander I. Ershov, Thomas Hofmann, Vladimir B. Fleurov | 2003-04-22 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey +7 more | 2003-04-01 |