Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Alexander I. Ershov, Thomas Hofmann, Vladimir B. Fleurov | 2003-04-22 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior +7 more | 2003-04-01 |