Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661826 | Laser chamber insulator with sealed electrode feedthrough | Richard C. Ujazdowski, Timothy Dyer, William N. Partlo, Michael Altheim, Brian Strate | 2003-12-09 |
| 6603549 | Convolution method for measuring laser bandwidth | Steven F. Haas, Richard L. Sandstrom, Alexander I. Ershov | 2003-08-05 |
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Jean-Marc Hueber, Alexander I. Ershov, Vladimir B. Fleurov | 2003-04-22 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior +7 more | 2003-04-01 |