Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661826 | Laser chamber insulator with sealed electrode feedthrough | Richard C. Ujazdowski, William N. Partlo, Michael Altheim, Brian Strate, Thomas Hofmann | 2003-12-09 |
| 6652366 | Dynamic slurry distribution control for CMP | — | 2003-11-25 |
| 6540592 | Carrier head with reduced moment wear ring | Stephen C. Schultz, John D. Herb | 2003-04-01 |