Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659850 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Nikolay Korovin, John D. Herb, James L. Farmer | 2003-12-09 |
| 6612903 | Workpiece carrier with adjustable pressure zones and barriers | Nikolay Korovin, John D. Herb, James L. Farmer | 2003-09-02 |
| 6599175 | Apparatus for distributing a fluid through a polishing pad | John D. Herb | 2003-07-29 |
| 6568991 | Method and apparatus for sensing a wafer in a carrier | John D. Herb, Ned Teeny | 2003-05-27 |
| 6540592 | Carrier head with reduced moment wear ring | John D. Herb, Timothy Dyer | 2003-04-01 |