Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659850 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Nikolay Korovin, Stephen C. Schultz, John D. Herb | 2003-12-09 |
| 6612903 | Workpiece carrier with adjustable pressure zones and barriers | Nikolay Korovin, Stephen C. Schultz, John D. Herb | 2003-09-02 |