Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659850 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Stephen C. Schultz, John D. Herb, James L. Farmer | 2003-12-09 |
| 6612903 | Workpiece carrier with adjustable pressure zones and barriers | Stephen C. Schultz, John D. Herb, James L. Farmer | 2003-09-02 |
| 6582277 | Method for controlling a process in a multi-zonal apparatus | — | 2003-06-24 |
| 6572755 | Method and apparatus for electrochemically depositing a material onto a workpiece surface | Ismail Emesh, Saket Chadda, Brian L. Mueller | 2003-06-03 |
| 6544103 | Method to determine optimum geometry of a multizone carrier | — | 2003-04-08 |
| 6508694 | Multi-zone pressure control carrier | — | 2003-01-21 |
| 6503767 | Process for monitoring a process, planarizing a surface, and for quantifying the results of a planarization process | — | 2003-01-07 |