Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612911 | Alkali metal-containing polishing system and method | Phillip W. Carter, Gregory Bogush, Francesco M. De Rege, Jeffrey P. Chamberlain, David Schroeder | 2003-09-02 |
| 6572755 | Method and apparatus for electrochemically depositing a material onto a workpiece surface | Ismail Emesh, Saket Chadda, Nikolay Korovin | 2003-06-03 |
| 6533832 | Chemical mechanical polishing slurry and method for using same | J. Scott Steckenrider | 2003-03-18 |
| 6527817 | Composition and method for planarizing surfaces | Mingming Fang, James A. Dirksen | 2003-03-04 |