Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656025 | Integrated pad and belt for chemical mechanical polishing | Anil K. Pant, Rahul Jairath, Kamal Mishra, Wilbur C. Krusell | 2003-12-02 |
| 6621584 | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing | Jiri Pecen, Rahul Jairath, Wilbur C. Krusell | 2003-09-16 |
| 6572755 | Method and apparatus for electrochemically depositing a material onto a workpiece surface | Ismail Emesh, Nikolay Korovin, Brian L. Mueller | 2003-06-03 |