Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656025 | Integrated pad and belt for chemical mechanical polishing | Anil K. Pant, Kamal Mishra, Saket Chadda, Wilbur C. Krusell | 2003-12-02 |
| 6621584 | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing | Jiri Pecen, Saket Chadda, Wilbur C. Krusell | 2003-09-16 |
| 6517418 | Method of transporting a semiconductor wafer in a wafer polishing system | Erik H. Engdahl, Edward T. Ferri, Jr., Wilbur C. Krusell | 2003-02-11 |