Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656025 | Integrated pad and belt for chemical mechanical polishing | Anil K. Pant, Rahul Jairath, Kamal Mishra, Saket Chadda | 2003-12-02 |
| 6621584 | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing | Jiri Pecen, Saket Chadda, Rahul Jairath | 2003-09-16 |
| 6616772 | Methods for wafer proximity cleaning and drying | John M. de Larios, Mike Ravkin, Glen Travis, Jim Keller | 2003-09-09 |
| 6594847 | Single wafer residue, thin film removal and clean | John M. de Larios, Mike Ravkin | 2003-07-22 |
| 6517418 | Method of transporting a semiconductor wafer in a wafer polishing system | Erik H. Engdahl, Edward T. Ferri, Jr., Rahul Jairath | 2003-02-11 |