Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622335 | Drip manifold for uniform chemical delivery | Don E. Anderson, Katrina Mikhaylich, John M. de Larios | 2003-09-23 |
| 6616772 | Methods for wafer proximity cleaning and drying | John M. de Larios, Glen Travis, Jim Keller, Wilbur C. Krusell | 2003-09-09 |
| 6611326 | System and apparatus for evaluating the effectiveness of wafer drying operations | Vladislav V. Yakovlev, Katrina Mikhaylichenko, John M. de Larios | 2003-08-26 |
| 6594847 | Single wafer residue, thin film removal and clean | Wilbur C. Krusell, John M. de Larios | 2003-07-22 |
| 6543084 | Wafer scrubbing brush core | Tanlin Dickey, Julia Svirchevski, Donald Anderson, Helmuth Treichel, Roy Winston Pascal +1 more | 2003-04-08 |
| 6537381 | Method for cleaning and treating a semiconductor wafer after chemical mechanical polishing | Katrina Mikhaylich | 2003-03-25 |
| 6521050 | Methods for evaluating advanced wafer drying techniques | Katrina Mikhaylichenko, Vladislav V. Yakovlev, John M. de Larios | 2003-02-18 |