Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6611326 | System and apparatus for evaluating the effectiveness of wafer drying operations | Vladislav V. Yakovlev, Mike Ravkin, John M. de Larios | 2003-08-26 |
| 6521050 | Methods for evaluating advanced wafer drying techniques | Vladislav V. Yakovlev, Mike Ravkin, John M. de Larios | 2003-02-18 |