Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622335 | Drip manifold for uniform chemical delivery | Don E. Anderson, Katrina Mikhaylich, Mike Ravkin | 2003-09-23 |
| 6616516 | Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates | Michael Ravkin, Katrina Mikhaylich | 2003-09-09 |
| 6616772 | Methods for wafer proximity cleaning and drying | Mike Ravkin, Glen Travis, Jim Keller, Wilbur C. Krusell | 2003-09-09 |
| 6611326 | System and apparatus for evaluating the effectiveness of wafer drying operations | Vladislav V. Yakovlev, Katrina Mikhaylichenko, Mike Ravkin | 2003-08-26 |
| 6594847 | Single wafer residue, thin film removal and clean | Wilbur C. Krusell, Mike Ravkin | 2003-07-22 |
| 6593282 | Cleaning solutions for semiconductor substrates after polishing of copper film | Xu Li, Yuexing Zhao, Diane Hymes | 2003-07-15 |
| 6521050 | Methods for evaluating advanced wafer drying techniques | Katrina Mikhaylichenko, Vladislav V. Yakovlev, Mike Ravkin | 2003-02-18 |