XL

Xu Li

Lam Research: 1 patents #78 of 202Top 40%
Overall (2003): #89,733 of 273,478Top 35%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6593282 Cleaning solutions for semiconductor substrates after polishing of copper film Yuexing Zhao, Diane Hymes, John M. de Larios 2003-07-15