Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593282 | Cleaning solutions for semiconductor substrates after polishing of copper film | Xu Li, Diane Hymes, John M. de Larios | 2003-07-15 |
| 6552812 | Method and system for measuring threshold length | Cangshan Xu | 2003-04-22 |