Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656030 | Unsupported chemical mechanical polishing belt | Brian Lombardo | 2003-12-02 |
| 6620035 | Grooved rollers for a linear chemical mechanical planarization system | — | 2003-09-16 |
| 6572463 | Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same | Eugene Zhao, Fen Dai | 2003-06-03 |
| 6561889 | Methods for making reinforced wafer polishing pads and apparatuses implementing the same | Eugene Zhao, Fen Dai | 2003-05-13 |
| 6552812 | Method and system for measuring threshold length | Yuexing Zhao | 2003-04-22 |