Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645052 | Method and apparatus for controlling CMP pad surface finish | Alan J. Jensen, Mario Stella, Peter Renteln, Jeffrey Farber | 2003-11-11 |
| 6641470 | Apparatus for accurate endpoint detection in supported polishing pads | Kang Jia, Michael D. Steiman, Herbert E. Litvak, Christian D. Frederickson | 2003-11-04 |
| 6572463 | Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same | Cangshan Xu, Fen Dai | 2003-06-03 |
| 6561889 | Methods for making reinforced wafer polishing pads and apparatuses implementing the same | Cangshan Xu, Fen Dai | 2003-05-13 |