Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645052 | Method and apparatus for controlling CMP pad surface finish | Alan J. Jensen, Eugene Zhao, Peter Renteln, Jeffrey Farber | 2003-11-11 |
| 6550091 | Double-sided wafer edge scrubbing apparatus and method for using the same | Allan M. Radman | 2003-04-22 |