Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645052 | Method and apparatus for controlling CMP pad surface finish | Alan J. Jensen, Mario Stella, Eugene Zhao, Jeffrey Farber | 2003-11-11 |
| 6620031 | Method for optimizing the planarizing length of a polishing pad | — | 2003-09-16 |