Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645052 | Method and apparatus for controlling CMP pad surface finish | Mario Stella, Eugene Zhao, Peter Renteln, Jeffrey Farber | 2003-11-11 |
| 6634936 | Chemical mechanical planarization or polishing pad with sections having varied groove patterns | Brian Thornton | 2003-10-21 |
| 6585579 | Chemical mechanical planarization or polishing pad with sections having varied groove patterns | Brian Thornton | 2003-07-01 |