Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641470 | Apparatus for accurate endpoint detection in supported polishing pads | Eugene Zhao, Kang Jia, Michael D. Steiman, Herbert E. Litvak | 2003-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641470 | Apparatus for accurate endpoint detection in supported polishing pads | Eugene Zhao, Kang Jia, Michael D. Steiman, Herbert E. Litvak | 2003-11-04 |