Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641470 | Apparatus for accurate endpoint detection in supported polishing pads | Eugene Zhao, Kang Jia, Michael D. Steiman, Christian D. Frederickson | 2003-11-04 |
| 6612902 | Method and apparatus for end point triggering with integrated steering | John M. Boyd | 2003-09-02 |