Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622335 | Drip manifold for uniform chemical delivery | Don E. Anderson, Mike Ravkin, John M. de Larios | 2003-09-23 |
| 6616516 | Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates | Michael Ravkin, John M. de Larios | 2003-09-09 |
| 6537381 | Method for cleaning and treating a semiconductor wafer after chemical mechanical polishing | Mike Ravkin | 2003-03-25 |