Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612315 | Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module | Brian Bliven | 2003-09-02 |
| 6558474 | Method for rinsing the backside of a semiconductor wafer | — | 2003-05-06 |
| 6543084 | Wafer scrubbing brush core | Tanlin Dickey, Julia Svirchevski, Donald Anderson, Mike Ravkin, Helmuth Treichel +1 more | 2003-04-08 |
| 6505417 | Method for controlling airflow on a backside of a semiconductor wafer during spin processing | Brian Bliven | 2003-01-14 |