Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612315 | Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module | Roy Winston Pascal | 2003-09-02 |
| 6607072 | Wheel and conveyor system for transporting semiconductor wafers | Michael Ravkin | 2003-08-19 |
| 6557202 | Wafer scrubbing brush core having an internal motor and method of making the same | Douglas G. Gardner | 2003-05-06 |
| 6505417 | Method for controlling airflow on a backside of a semiconductor wafer during spin processing | Roy Winston Pascal | 2003-01-14 |