Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Michael Vogtmann, Chris Frederickson, Jeff Gasparitsch, Gene Hempel | 2003-11-11 |
| 6517418 | Method of transporting a semiconductor wafer in a wafer polishing system | Edward T. Ferri, Jr., Wilbur C. Krusell, Rahul Jairath | 2003-02-11 |