Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Michael Vogtmann, Chris Frederickson, Jeff Gasparitsch, Erik H. Engdahl | 2003-11-11 |
| 6575816 | Dual purpose handoff station for workpiece polishing machine | Mike L. Bowman | 2003-06-10 |