Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Chris Frederickson, Jeff Gasparitsch, Gene Hempel, Erik H. Engdahl | 2003-11-11 |
| 6632012 | Mixing manifold for multiple inlet chemistry fluids | Michael S. Wisnieski | 2003-10-14 |
| 6505635 | Lifting and rinsing a wafer | Terry L. Lentz | 2003-01-14 |