Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621584 | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing | Saket Chadda, Rahul Jairath, Wilbur C. Krusell | 2003-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621584 | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing | Saket Chadda, Rahul Jairath, Wilbur C. Krusell | 2003-09-16 |