Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671294 | Laser spectral engineering for lithographic process | Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Richard L. Sandstrom, John M. Algots +1 more | 2003-12-30 |
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2003-09-23 |
| 6621846 | Electric discharge laser with active wavelength chirp correction | Richard L. Sandstrom, George J. Everage, Frederick Erie, William N. Partlo, Igor V. Fomenkov | 2003-09-16 |
| 6618421 | High repetition rate gas discharge laser with precise pulse timing control | Jennan Yu, Stuart L. Anderson, Helmut Schillinger, Tobias Pflanz, Claus Strowitzki +4 more | 2003-09-09 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Herve A. Besaucele, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +7 more | 2003-05-20 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Jean-Marc Hueber, Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior +7 more | 2003-04-01 |
| 6529531 | Fast wavelength correction technique for a laser | George J. Everage, Igor V. Fomenkov, Richard L. Sandstrom, Frederick Erie, John M. Algots | 2003-03-04 |