Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671294 | Laser spectral engineering for lithographic process | Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom +1 more | 2003-12-30 |
| 6650666 | Laser wavelength control unit with piezoelectric driver | Ronald Spangler, Robert N. Jacques, John Allen Rule, Frederick Palenschat, Igor V. Fomenkov +2 more | 2003-11-18 |
| 6532247 | Laser wavelength control unit with piezoelectric driver | Ronald Spangler, Robert N. Jacques, George J. Everage, Stuart L. Anderson, Frederick Palenschat +4 more | 2003-03-11 |
| 6529531 | Fast wavelength correction technique for a laser | George J. Everage, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, Frederick Erie | 2003-03-04 |