Issued Patents 2003
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671294 | Laser spectral engineering for lithographic process | Armen Kroyan, Ivan Lalovic, Palash P. Das, Richard L. Sandstrom, John M. Algots +1 more | 2003-12-30 |
| 6650666 | Laser wavelength control unit with piezoelectric driver | Ronald Spangler, Robert N. Jacques, John Allen Rule, Frederick Palenschat, John M. Algots +2 more | 2003-11-18 |
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more | 2003-09-23 |
| 6621846 | Electric discharge laser with active wavelength chirp correction | Richard L. Sandstrom, Palash P. Das, George J. Everage, Frederick Erie, William N. Partlo | 2003-09-16 |
| 6618425 | Virtual laser operator | Jason R. Carlesi, David J. Dunlap | 2003-09-09 |
| 6586757 | Plasma focus light source with active and buffer gas control | Stephan T. Melnychuk, William N. Partlo, Richard M. Ness, Daniel L. Birx late of, Richard L. Sandstrom +1 more | 2003-07-01 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Herve A. Besaucele, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +7 more | 2003-05-20 |
| 6566667 | Plasma focus light source with improved pulse power system | William N. Partlo, I. Roger Oliver, Richard M. Ness, Daniel L. Birx | 2003-05-20 |
| 6566668 | Plasma focus light source with tandem ellipsoidal mirror units | John Rauch, William N. Partlo, Richard M. Ness, Daniel L. Birx, Richard L. Sandstrom +1 more | 2003-05-20 |
| 6556612 | Line narrowed laser with spatial filter | Alexander I. Ershov | 2003-04-29 |
| 6541786 | Plasma pinch high energy with debris collector | William N. Partlo, Daniel L. Birx | 2003-04-01 |
| 6538737 | High resolution etalon-grating spectrometer | Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown | 2003-03-25 |
| 6532247 | Laser wavelength control unit with piezoelectric driver | Ronald Spangler, Robert N. Jacques, George J. Everage, Stuart L. Anderson, Frederick Palenschat +4 more | 2003-03-11 |
| 6529531 | Fast wavelength correction technique for a laser | George J. Everage, Palash P. Das, Richard L. Sandstrom, Frederick Erie, John M. Algots | 2003-03-04 |