Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Jean-Marc Hueber, Alexander I. Ershov, Thomas Hofmann | 2003-04-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Jean-Marc Hueber, Alexander I. Ershov, Thomas Hofmann | 2003-04-22 |